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- Dispensing Series
Features
- KOGANEI pumps are widely used in semiconductor manufacturing processes, as well as for flat panel displays (FPDs), batteries, and reagents, etc. According to the needs of the client application, the appropriate operation type or pump type can be selected.
- The liquid contact area is composed of teflon, and is resistant to various liquid chemicals.
- The structure has no sliding parts, which can avoid the generation of particles.
- No daily maintenance is required, and high repeatability of dispensing can be achieved.
Specification
| Model | Operating Type | Media | Max. Dispensing Volume | Max. Dispensing Pressure | Proof Pressure |
|---|---|---|---|---|---|
| F-APP10-5W
| Pneumatic (air cylinder) | Photoresist solution, pure water, chemical solution (no flammable substances allowed) | 10 ml | Max. 0.15 MPa | 0.3 MPa |
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