Name: Electric CT / PT / HT Pump
Brand: KOGANEI
SKU: KOGANEI_F-EPH

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KOGANEI_F-EPH

Electric CT / PT / HT Pump

Features

KOGANEI pumps are widely used in semiconductor manufacturing processes, as well as for flat panel displays (FPDs), batteries, and reagents, etc. According to the needs of the client application, the appropriate operation type or pump type can be selected.
The liquid contact area is composed of teflon, and is resistant to various liquid chemicals.
The structure has no sliding parts, which can avoid the generation of particles.
No daily maintenance is required, and high repeatability of dispensing can be achieved.
The AC serco motor improves flow rate control performance.

Specification

Model	Operating Type	Media	Dispensing Volume	Max. Dispensing Pressure	Proof Pressure
F-EPT30	AC servo motor	Photoresist solution, pure water, chemical solution (no flammable substances allowed)	3 ~ 30 ml	Max. 0.05 MPa	0.1 MPa
F-EPT60	AC servo motor	Photoresist solution, pure water, chemical solution (no flammable substances allowed)	6 ~ 60 ml	Max. 0.05 MPa	0.1 MPa
F-EPT100	AC servo motor	Photoresist solution, pure water, chemical solution (no flammable substances allowed)	10 ~ 100 ml	Max. 0.05 MPa	0.1 MPa
F-EPT200	AC servo motor	Photoresist solution, pure water, chemical solution (no flammable substances allowed)	20 ~ 200 ml	Max. 0.05 MPa	0.1 MPa
F-EPT300	AC servo motor	Photoresist solution, pure water, chemical solution (no flammable substances allowed)	30 ~ 300 ml	Max. 0.05 MPa	0.15 MPa
F-EPP200	AC servo motor	Photoresist solution, pure water, chemical solution (no flammable substances allowed)	20 ~ 200 ml	Max. 0.05 MPa	0.1 MPa
F-EPP300	AC servo motor	Photoresist solution, pure water, chemical solution (no flammable substances allowed)	30 ~ 300 ml	Max. 0.07 MPa	0.1 MPa
F-EPH200	AC servo motor	Photoresist solution, pure water, chemical solution (no flammable substances allowed)	20 ~ 200 ml	Max. 0.1 MPa	0.15 MPa
F-EPH300	AC servo motor	Photoresist solution, pure water, chemical solution (no flammable substances allowed)	30 ~ 300 ml	Max. 0.1 MPa	0.15 MPa