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KOGANEI_F-EPH

Electric CT / PT / HT Pump

  • Brand KOGANEI
Features
  • KOGANEI pumps are widely used in semiconductor manufacturing processes, as well as for flat panel displays (FPDs), batteries, and reagents, etc. According to the needs of the client application, the appropriate operation type or pump type can be selected.
  • The liquid contact area is composed of teflon, and is resistant to various liquid chemicals.
  • The structure has no sliding parts, which can avoid the generation of particles.
  • No daily maintenance is required, and high repeatability of dispensing can be achieved.
  • The AC serco motor improves flow rate control performance.
Specification
ModelOperating TypeMediaDispensing VolumeMax. Dispensing PressureProof Pressure
F-EPT30AC servo motorPhotoresist solution, pure water, chemical solution
(no flammable substances allowed)
3 ~ 30 mlMax. 0.05 MPa0.1 MPa
F-EPT60AC servo motorPhotoresist solution, pure water, chemical solution
(no flammable substances allowed)
6 ~ 60 mlMax. 0.05 MPa0.1 MPa
F-EPT100AC servo motorPhotoresist solution, pure water, chemical solution
(no flammable substances allowed)
10 ~ 100 mlMax. 0.05 MPa0.1 MPa
F-EPT200AC servo motorPhotoresist solution, pure water, chemical solution
(no flammable substances allowed)
20 ~ 200 mlMax. 0.05 MPa0.1 MPa
F-EPT300AC servo motorPhotoresist solution, pure water, chemical solution
(no flammable substances allowed)
30 ~ 300 mlMax. 0.05 MPa0.15 MPa
F-EPP200AC servo motorPhotoresist solution, pure water, chemical solution
(no flammable substances allowed)
20 ~ 200 mlMax. 0.05 MPa0.1 MPa
F-EPP300AC servo motorPhotoresist solution, pure water, chemical solution
(no flammable substances allowed)
30 ~ 300 mlMax. 0.07 MPa0.1 MPa
F-EPH200AC servo motorPhotoresist solution, pure water, chemical solution
(no flammable substances allowed)
20 ~ 200 mlMax. 0.1 MPa0.15 MPa
F-EPH300AC servo motorPhotoresist solution, pure water, chemical solution
(no flammable substances allowed)
30 ~ 300 mlMax. 0.1 MPa0.15 MPa
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