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KOGANEI_F-EPT10

High-Viscosity Liquid Chemicals Dispensing Pump

  • Brand KOGANEI
Features
  • KOGANEI pumps are widely used in semiconductor manufacturing processes, as well as for flat panel displays (FPDs), batteries, and reagents, etc. According to the needs of the client application, the appropriate operation type or pump type can be selected.
  • The liquid contact area is composed of teflon, and is resistant to various liquid chemicals.
  • The structure has no sliding parts, which can avoid the generation of particles.
  • No daily maintenance is required, and high repeatability of dispensing can be achieved.
Specification
ModelOperating TypeMediaDispensing VolumeMax. Dispensing PressureProof Pressure
F-EPT10-16WStepping motorPhotoresist solution, pure water, chemical solution
(no flammable substances allowed)
0.5 ~ 10 mlMax. 0.3 MPa0.4 MPa
F-EPT10-18WStepping motorPhotoresist solution, pure water, chemical solution
(no flammable substances allowed)
0.5 ~ 10 mlMax. 0.3 MPa0.4 MPa
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