Name: High-Viscosity Liquid Chemicals Dispensing Pump
Brand: KOGANEI
SKU: KOGANEI_F-EPT10

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KOGANEI_F-EPT10

High-Viscosity Liquid Chemicals Dispensing Pump

Features

KOGANEI pumps are widely used in semiconductor manufacturing processes, as well as for flat panel displays (FPDs), batteries, and reagents, etc. According to the needs of the client application, the appropriate operation type or pump type can be selected.
The liquid contact area is composed of teflon, and is resistant to various liquid chemicals.
The structure has no sliding parts, which can avoid the generation of particles.
No daily maintenance is required, and high repeatability of dispensing can be achieved.

Specification

Model	Operating Type	Media	Dispensing Volume	Max. Dispensing Pressure	Proof Pressure
F-EPT10-16W	Stepping motor	Photoresist solution, pure water, chemical solution (no flammable substances allowed)	0.5 ~ 10 ml	Max. 0.3 MPa	0.4 MPa
F-EPT10-18W	Stepping motor	Photoresist solution, pure water, chemical solution (no flammable substances allowed)	0.5 ~ 10 ml	Max. 0.3 MPa	0.4 MPa