Name: Electric CT Pump
Brand: KOGANEI
SKU: KOGANEI_F-EPT

Products

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KOGANEI_F-EPT

Electric CT Pump

Features

KOGANEI pumps are widely used in semiconductor manufacturing processes, as well as for flat panel displays (FPDs), batteries, and reagents, etc. According to the needs of the client application, the appropriate operation type or pump type can be selected.
The liquid contact area is composed of teflon, and is resistant to various liquid chemicals.
The structure has no sliding parts, which can avoid the generation of particles.
No daily maintenance is required, and high repeatability of dispensing can be achieved.

Specification

Model	Operating Type	Media	Dispensing Volume	Max. Dispensing Pressure	Proof Pressure
F-EPT06A1	Stepping motor	Photoresist solution, pure water, chemical solution (no flammable substances allowed)	0.5 ~ 6 ml	Max. 0.15 MPa	0.2 MPa
F-EPT10A1	Stepping motor	Photoresist solution, pure water, chemical solution (no flammable substances allowed)	0.5 ~ 10 ml	Max. 0.15 MPa	0.2 MPa